Design of an interface circuit system for mode-separation MEMS digital gyroscope

Abstract

In this paper, a novel digital closed-loop interface circuit system of MEMS vibrating gyroscope is proposed, which includes driving, detection and quadrature circuits. Because of the high sensitivity and precision of the MEMS gyroscope, the interface circuit system is established under the condition of mode separation. The driving circuit of MEMS gyroscope adopts digital automatic gain control (AGC) to realize self-excitation closed-loop control, which makes the gyroscope system simple in structure and good in robustness. First, the working principle of the gyroscope’s sensitive structure is introduced and the system simulation model of the sensitive structure is developed. Second, a [Formula: see text] ADC and DAC with single-bit output are designed and the feasibility of the driving circuit design is verified by the system-level model. Third, the quadrature closed-loop correction circuit is designed to reduce the coupling of the quadrature component to the gyroscope detection circuit. The simulation results show that the quadrature correction loop can effectively reduce the influence of the quadrature coupling on the detection loop of MEMS gyroscope. Finally, the system-level model of the gyroscope is established by SIMULINK, the overall system performance of the gyroscope is analyzed, and the test system of MEMS gyroscope is built by field-programmable gate array (FPGA) and application specific integrated circuit (ASIC). The experiment verifies the feasibility of the digital interface circuit design, and the zero-bias instability of the gyroscope system is 1.0∘/h.