Abstract
Abstract A variable capacitance, top-drive synchronous, electrostatic stepper motor model is presented. A surface micromachining technique is proposed for its fabrication. Simple theoretical modelling predicts that the Coulomb dry friction torque dominates the viscous and inertial torques over a large speed range. Dry friction coefficient values between thin-film-covered silicon chips have been measured by means of a pin-on-disc tribometer machine from CSEM S.A. Values between 0.3 and 0.4 have been found for LPCVD silicon nitride on LPCVD polysilicon, polysilicon on itself and silicon nitride on itself, in agreement with previous work. This result shows that a material pair with better friction behaviour still has to be found.
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