Abstract
In this paper, the results of modeling and simulation of a microcolumn are presented. The microcolumn is part of a developed miniature MEMS electron microscope equipped with a miniature MEMS high-vacuum micropump. Such an arrangement makes this device the first stand-alone miniature electron-optical device to operate without an external high-vacuum chamber. Before such a device can be fabricated, research on particular elements must be carried out to determine the working principles of the device. The results of the calculations described in this article help us to understand the work of a microcolumn with square holes in the electrodes. The formation of an electron beam spot at the anode is discussed. Further calculations and results show the dependence of the Einzel lens size on the electron beam spot diameter, electron beam current, and microcolumn focusing voltage. The results are used to define the optimal design of the developed MEMS electron microscope.
Highlights
Since the end of the 1980s, research has been carried out to fabricate miniature electron optical columns called microcolumns
Throughout the years, particular elements of the designed microscope were fabricated and tested: emitters [13,14], electrostatic lenses [15], membranes [16], deflector systems [17], and the results show that it is possible to fabricate a standalone miniature MEMS microscope
The gate and Einzel lens electrodes had square holes, which is consistent with the design of the microscope
Summary
Since the end of the 1980s, research has been carried out to fabricate miniature electron optical columns called microcolumns. According to Chang, to develop a microcolumn with good parameters, small apertures
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