Abstract
MEMS deformable mirror technology has recently evolved from a specialized wavefront control device to a low cost and high performance product. To facilitate adoption of this emerging technology, this research seeks to investigate: 1) the actual wavefront correcting capabilities of the different MEMS deformable mirror designs, and 2) how to design optical systems to effectively utilize this new technology. A high fidelity finite element model and a fast approximating model of a MEMS deformable mirror are described. Integrated design approaches using both models are compared, which combine the models with commercial optical design software. Defocus case studies are presented and results discussed.
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