Year-end Sale % OFF 
Abstract
Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per year, have been calling for low-cost gyroscopes. Bulk silicon is a promising candidate for low-cost gyroscopes due to its large scale availability and maturity of its manufacturing industry. Nevertheless, it is not suitable for a real monolithic IC integration and requires a dedicated packaging. New designs are supposed to eliminate the need for magnets and metal case package, and allow for a real monolithic MEMS-IC (Integrated Circuit) electronic system. In addition, a drastic cost reduction could be achieved by utilizing off-the-shelf plastic packaging with lead frames for the final assembly. The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators. The comb-drives are comprised of a single monolithic moving component (rotor) and fixed parts (stators). The former is made out of different concentrated masses connected by curved silicon beams in order to decouple the motion signals. The sensor was devised to be fabricated through the PolyMUMPs® process and it is intended for working in air in order to semplify the MEMS-IC monolithic integration.
Highlights
Gyroscopes are angular velocity sensors employed in several industrial applications such as inertial navigation, automotive control, rollover detection, etc. [1]
The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators
A tri-axial gyroscope was designed for angular velocity measurement purposes
Summary
Gyroscopes are angular velocity sensors employed in several industrial applications such as inertial navigation, automotive control, rollover detection, etc. [1]. Angular velocity is measured through the phase difference between two optical sources traveling in opposite directions Despite their large size and price, optical-based gyroscopes are attractive because of the high precision provided in terms of rotational rate information, robustness, and reliability. Crescenzi et al have shown that [20] the geometry of comb-drives fingers is of paramount importance to prevent the pull-in effect and achieve wide angular rotations These findings have been analyzed by Yeh et al [21] and Chang et al [22], who explored the relationship between pull-in and system geometry. The gyroscope is composed of a monolithic “rotating” part (rotor) and multiple fixed parts (stators) It employs comb-drives for both the actuated and the sensing components. The whole design is devoted to simplifying the MEMS-IC
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
