Abstract
Micro milling process is more favorite than other processes for its unique advantages in ultra-precision machining of miniature components with intricate three-dimensional geometrical feature made of various materials. Aiming at micro milling applications, a three-axis desktop milling machine tool with linear motors and nano-meter linear scales has been introduced. Natural granite is used as the frame material and air-bearing cylinders are used for z-axis gravity balancing. Finite element method is applied to the design and optimization of the machine structures. The designed machine adopts linear motors and 5nm resolution linear scale using an open control architecture. The workspace is 100mm×100mm×100mm and the overall size is 610mm×650mm×630mm. Experimental evaluations show the sub-micron machining feasibility of the introduced machine.
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