Abstract

This paper presents the development and analysis of a simple, low cost, high precision, multi channel beam current monitoring cum fluence system designed to monitor the ion beam currents, beam transmission and precise fluence measurement in 400 kV low energy accelerator. This 8-bit microcontroller based system uses multi-ranging, gain switched linear transimpedance amplifiers and a charge balancing voltage to frequency converter based digital integrator to provide 4 channel automatic low current measurement in the range of 15 pA to 100 μA. Extensive tests of this system showed a very good performance in current measurements with accuracy better than 1% and linearity error < 0.02%. This system also showed better results in case of charge measurements viz., ± 0.003% linearity error, < 0.01% zero offset and 0.006% long term stability. Apart from several advantages like low cost, standalone operation, easy re-configuration and customization, this system has many novel features such as uniform charge/pulse, multi-channel measurement and large capacity counter implementation using simple hardware and software counters which helped us to overcome the limitations of existing and commercial systems. The application of this system in ion implantation experiments on a variety of steel alloys showed satisfactory results.

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