Abstract
A new process of electrochemical machining (ECM) using an arc-form electrode is investigated for the removal of ITO from thin film transistor liquid crystal display (TFT-LCD) color filters. This study uses a fifth generation TFT-LCD as a test case. A smaller arc-form tool thickness and end radius provides an effective current density and a larger discharge space, enhancing the ITO removal process. A high-flow electrolyte velocity elevates the discharge mobility and improves the ITO removal effect. A color filter, combined with a fast feed rate, has enough electric power for highly effective ITO removal.
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