Abstract

In this paper, a bi-axial large stroke beam-flexure nano-manipulating servo stage is developed based on a novel compact flexure mechanism consisting of Z-shaped and Π-shaped flexure building blocks, which enables flexure supporting elements capable of adjusting the stiffness difference between the ending stage and the decoupling components. The proposed mechanism avoids the sudden change of stiffness of the Π-shaped flexure when the stage is in a back and forth motion. Therefore the overall design significantly reduces undesired error motions, which is a main purpose of our design. Mechanical analysis and dynamical modeling are provided with details, with which a PID controller is developed for nano-manipulation purposes. Based on the fabricated XY nano-stage, real time control and measurements are deployed, demonstrating the operating workspace up to 1.5 mm × 1.5 mm and the precision error of 16.25 nm (RMS) when tracking a sine wave with a stroke of 1.0 mm.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.