Abstract
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOFvibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6)is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications.
Highlights
Since the first micromachined tuning-fork gyroscope was reported by Draper laboratory in 1991 [1], many types of MEMS gyroscopes have been designed and manufactured
The number n of gyroscope units in the gyroscope array should be selected appropriately to ensure that the combination of gyroscope units increases the sensitivity of the system without decreasing the desired bandwidth of the system
The complete 2-DOF vibratory structure is utilized in both drive-mode and sense-mode, which provides the desired bandwidth of the system and improves the inherent robustness
Summary
Since the first micromachined tuning-fork gyroscope was reported by Draper laboratory in 1991 [1], many types of MEMS gyroscopes have been designed and manufactured. Conventional micromachined vibratory gyroscopes mainly employ the architecture with 1-DOF drive-mode and sense-mode, which increases the mechanical gain by matching the natural frequencies of two modes and allows enhancing the sensitivity [2,3,4]. For the purpose of improving the robustness of MEMS vibratory gyroscopes, the 2-DOF vibratory structure has been utilized in drive-mode or sense-mode to increase the bandwidth of the respective mode. To overcome the limitation in the DVA structure, a complete 2-DOF architecture with two masses and three springs has been employed in the sense-mode of some 3-DOF micromachined vibratory gyroscopes [8,9,10] This design demonstrated the advantage of gain and bandwidth in sense-mode. The proposed gyroscope array could improve the gain of sense-mode compared to the previous 4-DOF gyroscope [11].
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