Abstract
This paper presents the design of a new flexure-based xy micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures, the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large range of motion. Analytical modeling was carried out for parametric design of the stage. Evaluation results show that the designed xy stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical applications with a microscope.
Highlights
The micropositioning stage plays an important role in today’s engineering applications.Differently from conventional stages based on rigid-body joints, the flexure-based compliant mechanisms deliver strokes by elastic deformations of the material
Concerning the actuation aspect, the voice coil motor (VCM) is widely used for driving micropositioning stages, because it can provide large linear stroke, large acceleration, and infinitesimal resolution compared with the piezoelectric actuator (PZT) [15,16,17,18]
Proposed a more compact xy micropositioning stage, which is composed of bridge-type amplifiers and right-circular flexure hinges
Summary
The micropositioning stage plays an important role in today’s engineering applications. Proposed a more compact xy micropositioning stage, which is composed of bridge-type amplifiers and right-circular flexure hinges It combines the compactness and advantages of parallel-kinematic structure well, but the motion stroke is limited by its piezoelectric actuator. Such designs cannot be conveniently used under an inverted microscope or an upright microscope (common setup in biological micromanipulation) with a bottom light source To this end, a novel xy micropositioning stage is presented in this paper, which offers a large, hollow output platform. A novel xy micropositioning stage is presented in this paper, which offers a large, hollow output platform It has a parallel-kinematic structure and is actuated by two VCMs. The novel design takes full advantage of the space on the xy plane and z-axis, and it has a simple structure actuated by VCMs for achieving a large motion stroke.
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