Abstract
The work aims at designing a mobile indenter for nano-range measurement and inspectionof surface properties on small thin samples. The nanoindenter is capable of delivering aresolution of better than 10 nm with a piezoelectric-based actuation considered as a coreelement of the indenter. Emphasis has been made on the actuation analysis. Despitethe inherent nonlinearity of the piezoelectric material, the ability to producedesired responses with high accuracy at low electric field looks promising. In thispaper, hard and soft piezoelectric material types have been investigated for theactuation of the indenter and their natural response (without a controller) tospecific positioning tasks were analysed. With low electric fields, the piezoelectricmaterials demonstrate a good ability to follow desired commands. The mobility of theindenter is facilitated by such small actuators; a suitable controller for ultra-highpositioning with compensation for the errors due to inherent characteristics will beimplemented and instrumented with the whole indenter for the nano-range measurement.
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