Design of a magnetic spectrograph for surface, interface and thin-layer analysis

Abstract

The design of a magnetic spectrograph of the QDQ type, to be coupled to a 6 MV Van de Graaff accelerator for the analysis with Rutherford backscattering and recoil spectroscopy of surfaces and thin layers, will be shown. Due to the high energy resolution of. the instrument ( ΔE E ≈ 2 × 10 −4 ) the depth resolution is determined mainly by energy straggling and the combined effect of angular and lateral straggling, and is close to l monolayer near the surface. The mass discrimination of the spectrograph in combination with the energy dispersion of the detector in the focal plane makes possible the background-free detection of light ( 1H− 19F) atoms recoiling from a heavier substrate. The design of the total setup is such that channeling and channeling plus blocking experiments can be carried out, so that the position of light (or heavy) atoms on or in monocrystalline samples can be measured. The detector in the focal plane is position-sensitive in two dimensions so that with one setting of the spectrograph an energy range of 2% and an angular distribution of 5° (with a resolution of 0.1°) can be measured simultaneously. The opening angle in the energy-dispersive direction is 0.1°. The whole spectrograph, including the scattering chamber, can be rotated over 120° with respect to the beam line. For this purpose a bellows construction is made between the beam line and the scattering chamber, permitting the rotation while maintaining a vacuum of ≈ 10 −10 Torr in the chamber.