Abstract
An electrostatic optical system with an intermediate beam crossover has been designed to produce a focused ion beam. In order to obtain the finely focused beam at the target, low magnification and low aberration are required for the illumination system because of the large size of the beam crossover. Chromatic aberration, which is dominant in focused ion beam systems with liquid metal ion sources, has been reduced by shortening the focal length of the objective lens in the illumination system. Using an objective lens with cone-shaped electrodes (focal length of ∼20 mm), calculation gave the maximum current densities of 0.93 and 100 A/cm2 for 5- and 150-kV beams, respectively, at the target under the following conditions: a virtual source size of 30 nm, angular current density of 20 μA/sr, and energy spread of 10 eV.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
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