Abstract
Precision components in optical instruments enjoy the benefits of kinematic flexure mount, owing to its excellent performance evident in space telescope and lithography equipment. The stiffness behavior of a flexure mount is important for releasing thermal stress and resisting displacement. However, they still need enough investigation and design guidance. In this paper, a novel kinematic flexure mount comprising three identical chains, is proposed based on exact constraint principles. Considering radial translational and supporting stiffnesses, a single chain of the mount is designed using the cross-spring pivots. Then, the stiffnesses are analyzed to better evaluate the influences of configuration parameters. Stress analysis is also implemented by stress checking to fulfill large motion range. Moreover, a practical case for supporting a 1-m primary mirror is designed to validate the effectiveness of the design, and stiffnesses for a single chain are verified by finite element analysis (FEA). For design validation, the system is simulated and compared with traditional three-bipod mount. The results show that the proposed mount is capable of greatly releasing thermal stress introduced into the mirror and provides adequate supporting stiffness.
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