Abstract
This paper presents a novel design for high performance positioning stage, an representative application of such positioning stage is in semi conductor packing process, whose requirements are high precision and high acceleration. However, with the increase of motion acceleration(＞10g), the traditional linear stage with fixed stator structure can't suppress the base vibration caused by reactive force, then the stage accuracy decreases seriously. In this design, a floating stator structure for linear stage is proposed. The main goal is to reduce the effect of the reaction force on the stage from accelerating the mover. For the optimal structure variables, the model of single axis stage with floating stator is first developed. Then three application requirements are converted to performance indices, by taking the mechanical structure variables as optimal variable, optimization problem is formulated and solved by using Differential Evolution method. The performance of proposed structure is verified by simulations. Then a prototype of 2-DOF linear stage with floating stator is constructed, the concerned performance of high acceleration, high accuracy and low vibration is validated by numerous experiments.
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