Abstract
The design of an Auger spectrometer which can be used in a dedicated STEM is discussed. It utilizes the parallelizing properties of the post-specimen field of the VG HB5 high-excitation objective lens. Correction of aberrations up to the fourth order has been achieved by balancing the spectrometer aberrations with those of the pre-spectrometer deflection and transport optics. The performance of the spectrometer is expected to be better than other designs for the same optical conditions. In addition, some considerations of the general problem of high-efficiency collection of electrons emitted from a sample immersed in a magnetic field is discussed.
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