Abstract
In the MEMS optical switch assembly, the collision is likely to happen between the optical fiber and the U-groove of the chip due to the uncontrollable assembly errors. However, these errors can hardly be completely eliminated by the active control using high precision sensors and actuators. It will cause the large acting force and part damage, which further leads to the assembly failure. To solve this question, this paper presents a novel low-cost three-degree-of-freedom (three-DOF) passive flexure system to adaptively eliminate the planar assembly errors. The flexure system adopts three parallel kinematic chains with a novel 3-RPR structure and has a compact size with a diameter of 125 mm and thickness of 12 mm. A novel eddy current damper with the structure of Halbach array permanent magnets (PMs) is utilized to suppress the adverse mechanical vibration of the assembly system from the background disturbances. Analytical models are established to analyze the kinematic, static, and dynamic performances of the system in detail. Finally, finite element analysis is adopted to verify the established models for optimum design. The flexure system can generate a large deformation of 1.02 mm along the two translational directions and 0.02° along the rotational direction below the yield state of the material, and it has much higher natural frequencies than 200 Hz. Moreover, the large damping force means that the designed ECD can suppress the system vibration quickly. The above results indicate the excellent characteristics of the assembly system that will be applied into the optical switch assembly.
Highlights
Precision assembly technique is considered as one of the key technologies in many engineering applications
MEMS optical switch is a kind of precision system integrated with silicon chip and optical fiber, which is used for switching optical path in the new generation optical communication network
In the assembly of optical switch, a microgripper is usually utilized to grasp the optical fiber and place it accurately into the U-groove of the silicon chip. e key to success lies in the assembly system. ere are several key design considerations in the design of the assembly system, such as the assembly method, system compactness, and assembly cost
Summary
Precision assembly technique is considered as one of the key technologies in many engineering applications. Erefore, it has become a key component of many devices in the optical communication network, such as optical adddrop multiplexer, optic-cross connector, optical exchange, and optical wave router Since both the silicon chip and the optical fiber are vulnerable components, the assembly process should consider the coupling efficiency of optical fibers and the damage to these components during assembly. For the flexure-based assembly system, the stiffness of the flexure mechanism should be much lower for a large error compensation range It will cause the adverse mechanical vibration. Erefore, the passive ECD is very suitable for the vibration suppression of flexure assembly system in comparison with other dampers. Is paper presents a low-cost flexure assembly system, utilizing a three-DOF flexure mechanism based on the 3RPR structure and a passive ECD to guarantee a large error compensation range with negligible mechanical vibration.
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