Design, Modeling, and Testing of a Novel XY Piezo-Actuated Compliant Micro-Positioning Stage.

Quan Zhang,Yuan Wang,Jianguo Zhao,Jun Huang,Qing Xiao,Xin Shen

doi:10.3390/mi10090581

Quan Zhang, Yuan Wang + Show 4 more

Open Access

https://doi.org/10.3390/mi10090581

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Abstract

A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.

Highlights

With the rapid development of microelectromechanical systems (MEMS), nanotechnology, and precision engineering, the demands on precision positioning technology have been increasing
Two kinds of parallelogrammechanisms and a bridge-type amplification mechanism were modeled by a Beam constrained model and Castigliano’s second theorem, respectively
Two kinds of parallelogram mechanisms and a bridge-type amplification mechanism were modeled by a Beam constrained model and Castigliano’s second theorem, respectively

Summary

Introduction

With the rapid development of microelectromechanical systems (MEMS), nanotechnology, and precision engineering, the demands on precision positioning technology have been increasing. To overcome the difficulties caused by the small stroke of the PEAs, a compliant displacement amplification mechanism is usually introduced, between the actuator and the micro-positioning stage, to improve the output displacements of the system. The actuator was placed in the middle plane and two orthogonal bridge-type amplification mechanisms were placed in the other two planes, which made it a sandwich structure Such a design made the structure of the stage more compact. Li et al [27] combined compound bridge-type amplification mechanisms and compound parallelogram mechanisms based on flexible beams to design a completely decoupled micro-motion stage. A bridge-type amplification mechanism was employed to amplify the output displacement of the PEA and a new decoupling mechanism based on compound parallelogram flexures was developed. The lateral stiffness of the compound parallelogram mechanism KCBPM is calculated as: KCBPM

Model of Bridge-type Amplification Mechanism

Stiffness Model of the Positioning Stage

Dynamic Analysis

Conclusion

Findings

Conclusions