Abstract
Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes
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https://doi.org/10.1007/s00542-024-05670-7
Copy DOIJournal: Microsystem Technologies | Publication Date: Apr 26, 2024 |
Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes
Join us for a 30 min session where you can share your feedback and ask us any queries you have