Abstract
This work presents the design, modeling, and analysis of a 3-D spiral inductor with magnetic thin-films for power supply applications in the frequency range of 3-30 MHz. A closed-form analytical expression for the inductance, including both air-core (winding) and magnetic-core (magnetic thin-films) contributions, of the 3-D spiral inductor structure with magnetic thin-films is derived. To validate the winding inductance model, we implement a 3-D spiral inductor with an air-core on PCB. The theoretical calculation of air-core inductance (winding inductance) is in good agreement with experimental data. The error is 5.63%. Similarly, to validate the inductance model of the magnetic-core, a 3-D spiral inductor structure with magnetic thin-films is constructed in ANSYS Maxwell; when the simulation and analytical model results of magnetic-core inductance are compared, the reported error is 5.29%. In addition, a winding AC resistance model is presented. The maximum error is 5.51%. To understand the significance of the 3-D spiral inductor structure, we perform a design space exploration (DSE). A systematic analysis is carried out to have strategically arranged inductor components (winding and core) to enhance the performance. Two important performance parameters are discussed: dc quality factor (<i>Q<sub>dc</sub></i>) and ac quality factor (<i>Q<sub>ac</sub></i>). Also, a 3-D spiral inductor structure with magnetic thin-films is characterized in ANSYS Maxwell to estimate its potential. A novel fabrication method is proposed to implement the 3-D spiral inductor with magnetic thin-films. The measured relative permeability (μ<sub><i>r</i></sub>) and magnetic loss tangent (<i>tan</i> δ) of magnetic thin-films (Co-Zr-Ta-B), developed in-house, are used to simulate the proposed structure. The numerical solutions reveal that the 3-D spiral inductor with magnetic thin-films has the potential to demonstrate a figure-of-merit (FOM) of 1.18–48.44× higher than comparable traditional inductors. The results of DSE can be extended rather easily to traditional 3D inductors such as the solenoid and the toroid to improve performance.
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