Design Methods for Micro-Electro-Mechanical Bandpass Filters with Transmission Zeros

Abstract

A design method for high-order electro-mechanical filters allowing the synthesis of architectures of electro-mechanical filters from equivalent electrical prototypes is presented. Conditions for existence of the equivalent mechanical system for a given electrical network are derived. This method is applied to the problem of the design of band-pass electro-mechanical filters with transmission zeros in the stopband. Electro-statical coupling of micro-mechanical resonators that avoids the use of a mechanical coupling spring is introduced. The application to the simulation and design of a bandpass filter with finite transmission zeros implemented in a thick-layer epi-poly silicon micro-machining technology is shown.