Design method for a reflective optical system with low tilt error sensitivity

Abstract

The realization of the final performance of the optical system depends not only on the aberration correction of the optical design but more importantly on the control of the position error of the optical element during the construction process. Therefore, reducing the error sensitivity of the optical system is an important part of the optical system design process. In order to obtain an optical system with low error sensitivity, this paper proposes an evaluation function of the tilt error sensitivity of the optical system and establishes a desensitization design method for the optical system. Taking an off-axis three-mirror optical system as an example for desensitization design. By comparing the variation of wave front error (WFE) caused by the tilt error of the optical system before and after the desensitization design, the correctness of the evaluation function and the effectiveness of the desensitization design method of the optical system are proved.