Abstract
Heterodyne interferometers with two opposite Doppler shift interference signals have been proposed for high-resolution measurement with high measurement speed, which can be used in the background of high-speed high-resolution measurement. However, a measurement error model for high-speed high-resolution heterodyne interferometers (HSHR-HIs) has not yet been proposed. We established a HSHR-HI measurement error model, analyzed the influence of beat frequency stability with a simplified optical structure, and then designed an offset-locked dual-frequency laser source with a digital control system to reduce the impact of beat frequency drift. Experiments were used to verify the correction of the measurement error model and the validity of the laser source. The results show that the new laser source has a maximum beat frequency range of 45 MHz, which shows the improvements in the measuring speed and resolution.
Highlights
Ultra-precision measurement and positioning provides essential support to modern precision engineering, lithography, and advanced scientific applications
This situation was not improved until a high-speed high-resolution heterodyne interferometer (HSHR-HI) with two opposite Doppler shift interference signals was proposed [10,11,12]
The beams output from the fibers split into combined with beam 3 reflected by retro reflectors RRm, and coupled into fiber coupler 5 (FC5) to four beams in the interferometer
Summary
Ultra-precision measurement and positioning provides essential support to modern precision engineering, lithography, and advanced scientific applications. Some researchers designed a balanced optical path interferometer to reduce the nonlinearity error; the measurement speed is restricted and may decrease by half when applied on a double-path interferometer [5] This situation was not improved until a high-speed high-resolution heterodyne interferometer (HSHR-HI) with two opposite Doppler shift interference signals was proposed [10,11,12]. To reduce theimpact influence measurement accuracystability and measuring speed were analyzed, factors that are different laser from of the beat frequency on the measurement accuracy,especially an offset-locked dual-frequency those affecting traditional interferometers the stability of beat frequency. To reduce theverified influencethe of source with spatially separated outputlike beams was developed, and experiments the beat frequency stability on the accuracy, an offset-locked dual-frequency laser source correctness of the error model andmeasurement the superiority of the laser source.
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