Design, fabrication, and testing of microelectromechanical system spark gap switch based on streamer theory

Abstract

In order to realize that the fuze micro system has both high security and miniaturization characteristics, the spark gap research of Micro-Electro-Mechanical System safety system is carried out. So that to solve the safe and reliable function of the spark gap switch under the low power supply voltage (35 V) of the fuze micro system, the gas gap size and electrode radius are shown to significantly affect the gas breakdown voltage using streamer theory. Based on these results, a spark gap switch with triggering electrodes is designed. The triggering electrode gap is 2 μm and the main electrode gap is 10 μm. A spark gap switch test circuit is designed based on the RLC circuit. Through finite element simulation, it is verified that the gas breakdown voltage increases nonlinearly with increasing gap size. Pre-breakdown spark gap switches were fabricated based on the surface silicon process and tested. The test results show that the conduction voltage values of the triggering electrode and the main electrode are basically consistent with the simulation and calculation results. The breakdown voltage of the main electrode can be greatly reduced by applying a certain voltage to the triggering electrode, realize the reliable function in the micro fuze system.