Abstract
A spin coater is widely used for thin film coating in nano/microtechnology. In this paper, a spin coater with inexpensive mechanical and electronic components was fabricated based on an open-source Arduino microcontroller. To measure and control the spin speed of the spin coater, two sensor types including two infrared (IR) light-emitting diodes (LEDs) or a Hall Effect (HE) integrated circuit (IC) were used. The spin coater was tested for coating polydimethylsiloxane (PDMS) polymer in the spin speed range of 1000–9000 rpm (revolutions per minute). An optical interferometric method was used to determine the thickness and optical transmittance of the spin-coated PDMS films. The results show that the performance of this spin coater is similar to that of a commercial model and therefore it can be used in the laboratory and for student education. The total cost and power consumption of the spin coater are less than $30 and 5 W, respectively.
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