Design, fabrication and on-the-die characterization of a MEMS tuning-fork gyroscope

Abstract

In this paper, we report design, fabrication and characterization of a MEMS tuning-fork gyroscope. The main novelty of the reported work is in devising and using an experimental set-up for angular rate measurements using an open die MEMS gyroscope structure. A detailed methodology of characterization of the gyroscope is discussed. The complete experimental setup for angular rate measurement is presented. Using in-house fabrication facilities, the gyroscopes are fabricated and tested for rate measurements at different applied rotation rates from 1 $$^{\circ }/\hbox {s}$$ to $$35^{\circ }/\hbox {s}$$ . The rate sensitivity is recorded as $$60\,\upmu \hbox {V}/^{\circ }/\hbox {s}$$ with a noise floor of $$20\,\upmu \hbox {V}$$ .