Abstract
At bit densities now approaching 1 terabit per square inch, positioning the read-write head in a hard disk drive over data bits will require novel servo configurations and controllers. This paper presents a MEMS microactuator for installation in a dual-stage servo system for a hard disk drive and controller designs that utilize the microactuator to suppress vibration of the servo arm. The microactuator uses high-aspect ratio etching and deep trench isolation to generate high force densities and good mechanical robustness. The microactuator is installed in a hard disk drive and will be used to evaluate controllers designed to suppress airflow-induced vibration. Simulated and experimental results using PQ design methodology are presented.
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