Abstract
A micro-fabricated parylene-packaged flexible pentacene thin film transistor is presented. Different from preceding devices that have been reported, this thin film transistor employs parylene as the substrate, the gate insulator and also the encapsulation layer. Also, this thin film transistor uses pentacene, an organic semiconductor with high mobility, as the active material. The transistor consists of Au/Cr gates and Au source and drain electrodes and takes a bottom-contact configuration. The freshly made thin film transistor shows a hole mobility of 0.084809 cm2/V-s with an on-off ratio of 104.
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