Design, Fabrication and Characterization of Inter-Layer Microheaters Using LTCC Technology

Abstract

This paper presents design, fabrication and characterization of novel inter-layer microheaters based on low temperature co-fired ceramics (LTCC) technology. LTCC microheater structures (S1 to S3) with three different heater configurations has been presented. Microheater structure S1 has a heater pattern generated only on the top LTCC layer while S2 and S3 structures have inter-layer heater patterns. These structures have been simulated using COMSOL software to depict the temperature distribution over the active area. LTCC being a multilayer technology, heater patterns are generated in two different layers of LTCC tapes and connected through vias (3D interconnections) to fabricate inter-layer microheaters. By distributing the heater pattern of S1 equally in two LTCC tape layers (as in S3), this method allows possibility to develop miniature LTCC microheaters using conventional screen-printing process. The developed microheaters are characterized and the results are compared. At an input power of ∼1 W, structure S3 reaches a peak temperature of 316 °C as compared to 272 °C achieved with S1 configuration. Thermal imaging results shows better temperature uniformity in the active area for inter-layer microheaters as compared to microheater having heater pattern only on the top LTCC layer.