Abstract
This paper presents a high-performance bimorph MEMS cantilever harvester with partially covered asymmetrical functional piezoelectric layers on both sides of a beryllium bronze foil. The optimal PZT coverage length is employed to improve the output power density. The two piezoelectric layers with the controlled different thicknesses for the top and bottom PZT layers can provide three different output powers. Furthermore, a proof mass tungsten bonded at the free end of the cantilever can reduce the resonant frequency. The experimental results showed that the serial-connected bimorph piezoelectric energy harvester can obtain the maximum power density of 26.90 mW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> at the matched loading resistance of 660 kQ under 1.5-g acceleration at the resonant frequency of 38.89 Hz. The normalized power density of the harvester can reach 307.4 μW·g <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-2</sup> · cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> . Meanwhile, the harvester provides good stability under 1.5-g acceleration amplitude.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
