Abstract
In this work diffractive optical elements were designed using the Iterative Fourier Transform Algorithm, developed and refined for using in Diffractive Optical Elements and lithographic mask design. The Iterative Fourier Transform Algorithm was run with Matlab tools. The designs were implemented using lithographic masks produced on transparencies through a commercial, low cost off-set process. These masks were used to perform optical lithography on glass substrates. Final tuning by plasma etching was necessary to obtain well performing diffractive optical elements.
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