Abstract
A new TOF-SIMS with high spatial and mass resolution has been constructed and applied to the in-situ micro-scale analysis of trace elements in geological materials with complex structural and chemical features. Double second-order reflectrons without mesh between different electric field regions of achieve greatly improved secondary ion transmission and mass resolution. The new TOF-SIMS can produce an O2- beam of ca. 5 μm diameter with a beam intensity of ca. 5 nA and a secondary ion mass resolution of more than 20,000 (FWHM). Functionality has been demonstrated by the analysis of Ti and rare earth elements in zircon.
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