Abstract
The cylindrical mirror analyzer (CMA) is one of the most widely used electron energy analyzers in Auger electron spectroscopy and surface science because of its remarkable focusing properties at relatively large acceptance solid angles, that is, high signal intensity, reasonable energy resolution, and ease of construction and operation. In this presentation the design considerations and parameters of cylindrical mirror analyzers are presented using ray tracing simulation. The effects of the angular divergence and the widths of the source (point and extended) and the image slits on energy and time resolution are considered for resolution improvement.
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