Abstract
In this paper various practical and theoretical design considerations that lead to a successful MEMS electrostatic actuator design for laboratory-training purposes are examined and simulation results are presented. Two basic actuator structures cantilever beam and fixed beam are simulated using SUGAR MEMS simulation software. Simulation results show the proper size of the actuator for fabrication.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
