Abstract
Most of the works about single-photon detectors rely on Single Photon Avalanche Diodes (SPADs) designed with dedicated technological processes in order to achieve single-photon sensitivity and excellent timing resolution. Instead, this paper focuses on the implementation of high-performance SPADs detectors manufactured in a standard 0.35-micron opto-CMOS technology provided by AMS. We propose a series of low-noise SPADs designed with a variable pitch from 20 μm down to 5 μm. This opens the further way to the integration of large arrays of optimized SPAD pixels with pitch of a few micrometers in order to provide high-resolution single-photon imagers. We experimentally demonstrate that a 20-micron SPAD appears as the most relevant detector in terms of Signal-to-Noise ratio, enabling emergence of large arrays of SPAD.
Highlights
Single-photon detection was the domain of photomultiplier tubes (PMT)
We start characterizing the Single Photon Avalanche Diodes (SPADs) with the evaluation of the static current-voltage characteristic in the reverse bias mode of operation
Based on the literature and the deep characterization of our chip, we can conclude that the 20 μm photodiode appears as the optimal candidate for a further integration into a two-dimensional SPAD imager designed with the AMS 0.35 μm Opto process
Summary
Single-photon detection was the domain of photomultiplier tubes (PMT). Since the first demonstration in 1949 [1], PMT devices still play an important role because they offer extremely good performance. Remarkable results have been obtained with the implementation of the first SPADs imagers in 130 nm and 90 nm technologies Despite these significant prototypes, there still remain several challenges to be faced for their effective applicability in consumer-applications [5]. Among these challenges, the most relevant one is the use of standard CMOS technology while preserving a level of performance similar to the performance obtained with a customized process. For fluorescence applications (fluorescence lifetime imaging microscopy and fluorescence spectroscopy) SPADs could be very useful by ensuring better spatial resolution than PMTs provide [11]. The choice of the optimal photodiode area for the generation of SPAD Geiger concluded from the results of the electronic and optical characterizations performed on the designed components
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