Design, CAD-data generation and fabrication of diffractive lenses with submicron feature sizes

Abstract

Binary and multilevel diffractive lenses with submicron feature sizes are realized on silicon wafers using direct electron beam lithography and reactive ion etching. The respective diffractive patterns of the lenses are computer calculated and the appropriate pattern data are generated with the help of a commercially available CAD tool. For enhanced efficiency the lens patterns have a three dimensional profile.