Design and thermal analysis of Permanent Magnet Synchronous Motor of Dry Vacuum Pump for Semiconductor Equipment

Abstract

Dry vacuum pump has the characteristics of no oil consumption, low pollution, simple structure, wide range of pumping speed, etc. It is widely used in various semiconductor equipment requiring no oil vapor pollution. The permanent magnet synchronous motor is the main power source of the dry vacuum pump, and the torque fluctuation of the motor rotor in the electromagnetic field is the vibration source of the motor and the dry pump. The copper loss, iron loss and wind wear generated during the operation of the motor are transmitted to the drive shaft in the form of heat along the motor shaft, which will cause the deformation of the drive shaft. Usually, the vacuum pump drive motor adopts water cooling to dissipate heat. In this paper, a permanent magnet synchronous motor for 11kw dry vacuum pump is developed and designed, and a flow-heat coupling model for motor cooling is established. Firstly, the no-load and load characteristics of the motor are studied by using the JMAG simulation software. Taking the stator tooth width as the optimization parameter, the quadratic response surface method is used to optimize the back EMF harmonics and cogging torque of the motor, and the basic parameters of the motor are determined. size. Finally, based on the calculation of the electromagnetic field loss of the motor, the flow field and temperature field of the motor and the casing were simulated in fluent, and the flow field vector model of the cooling liquid in the coil was established. Eddy current and velocity distribution and temperature rise of water flow.