Abstract

We present the design of prototype electrostatic scratch-drive micro-robot with dimensions of 365 mum times75 mum. The micro-robot consists of three scratch drive actuators (SDA) and two steering arms. The method of motion is controlled by delivering power via capacitive coupling, with an underlying electric grid, to micro-robot. Then, micro-robot can move freely without connected wire. The behavior of micro-robot using analytical solutions and FEM simulation (ANSYS) has been investigated.

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