Abstract
A microelectromechanical system-based digital-to-analog converter (MEMS DAC) using a bent beam electrothermal compliant actuator as a single mechanical bit is proposed in this work. Two types of MEMS DAC namely asymmetric and symmetric structures with multi-bent beam actuators in a chevron arrangement are designed, modeled and simulated in MEMS CAD tool CoventorWare. The proposed DACs generate the mechanical displacement at the output from the digital input based on the principle of weighted stiffness which is analogous to an electronic weighted resistor DAC. The DACs are built using a standard SOIMUMPs process, and its coupled electrothermomechanical analysis is carried out to illustrate their performance. The device operates on 5 V which is well suited with conventional CMOS logic and in turn reduces the power consumption of the device. The simulation result shows that symmetric and asymmetric MEMS DACs produce a nonlinear error of 0.5 and 3.5% from its ideal straight line. The nonlinearity error is found to be less in symmetric design due to equal width of bent beam.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.