Design and simulation of antireflection coating for application to silicon solar cells

Abstract

Phosphorous silicate glass (PSG) was formed at the temperature range 800–900°C during diffusion of phosphorous (P) into Si wafers from liquid POCl 3 source in ambient atmosphere of N 2 and O 2. The thickness and refractive indices were measured by an ellipsometer. The refractive index increased with the temperature of formation upto 875°C and then became constant at which point PSG is saturated with P. From the growth rate data at different temperatures, the linear and parabolic activation energies were determined as 0.79 and 1.43 eV for parabolic and linear rate constants, respectively. Therefore, growth rate of PSG is higher than thermal SiO 2. The PSG films were found to have refractive indices 1.85, 1.78, 1.74 and 1.71 for forming temperature 800°C, 825°C, 850°C and 875°C, respectively. Reflectivity varied from 2.5% to 7.5% in the wavelength range 450–700 nm. SIMS depth profiling suggests that there has been a pile up of P on the Si side at the Si/SiO 2 (PSG) interface.