Design and simulation of a waveguiding MOEMS gyroscope with ultrawide optical bandwidth based on tunable cascaded Fabry–Perot cavities

Abstract

In this paper, a waveguiding MOEMS gyroscope with an ultrawide optical bandwidth is proposed, using tunable cascaded Fabry–Perot cavities consisting of Bragg mirrors. Input rotation can be measured by detecting either the wavelength or the intensity of the output resonant peak, corresponding to a sensitivity of 0.084 nm/(deg/s) and 0.021%/(deg/s) respectively. The simulated results show a comparable sensitivity with a much compact structure. An ultrawide optical bandwidth over 175 nm is demonstrated, which may releases the need for integrated lasers with narrow linewidth and tunable wavelength, suggesting a fully-integrated inertial sensor.