Design and Simulation Analysis of Different Diaphragm Shapes for Piezoresistive Pressure Sensor

Abstract

Pressure sensors are widely employed in a variety of industries, including the automotive, medical, pneumatic, and military professions. The piezoresistive type of pressure sensor is the most used transduction mechanism since it has simple readout circuitry and is inexpensive to manufacture. A piezoresistive pressure sensor is made up of a sensing device, which is a diaphragm, and appropriate circuitry to translate the diaphragm’s deflection into an electrical signal. The design of the diaphragm has a considerable impact on the sensitivity of a sensor. This study undertakes a theoretical analysis of a piezoresistive pressure sensor design with different diaphragm designs as a consequence. A square diaphragm has been shown to be ideal for the creation of very sensitive pressure sensors.