Abstract
摘要: 通过对光栅尺原理的研究，设计一种宏微复合切换测量模式，利用增量码进行低精度测量，绝对码进行高精度测量。采用增量方式采集莫尔条纹的高速性，解决高精度绝对位置采集的低速性，实现宏微复合的高速与高精度的测量。实验证明,高精度低速绝对位置测量过程中测量精度可达0.6 m，在测量中使用新型高速与低速的变速切换测量方式，综合测量速度最高可以达到2 m/s。 关键词: 绝对光栅尺 / 宏微复合 / 速度切换 / 精密
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