Abstract
The contribution is focused on design and realization of planar capacitive proximity sensor based on DuPont GreenTape™ 951 LTCC. Based on Comsol Multiphysics simulation software results, planar capacitive proximity sensors with different structures and topologies were realized and measured. After accelerated ageing test series, capacitive sensors stability parameters were measured. Developed capacitive proximity sensors had been characterized. Influence of different sensor topologies and structures on capacitive sensor's performance was analyzed.
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