Abstract
This paper presents the design, analysis and simulation of metal-to metal contact series rf-MEMS switch for its pull-in voltage optimization. Fixed — fixed flexure is used as a switching element and the Pull-in voltage is optimized for generating a force to obtain a stable contact resistance. Au is used as the contact material. The simulated value of the pull-in voltage (V pi ) is approximately 10.20 V. At the pull-in voltage the area occupied under contact is 8.89 µm2 and the value of contact force is 1.84 µN. The switch pull-in voltage value is optimized at a value of 23 V giving contact area of 924 µm2 and contact force of 31.55 µN.
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