Abstract
In this paper, the design, analysis and experimental results of the self-sustained oscillation loop for a tunable surface micromachined resonant accelerometer, ACRC-RXL are presented. The fabrication process of the mechanical structure is also illustrated. For the oscillation loop analysis, an operator-theoretical approach is applied based on the describing function technique. Using the analytical results, feedback parameters are designed and the expected loop performance is characterized. Then the accelerometer system is practically implemented using the mechanical structure and signal processing electronics. The experimental results show that the developed accelerometer has a performance of bias stability of about 0.7 mg and a dynamic range over 10 g, which satisfies the navigation-graded sensor performance.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
