Abstract

It is difficult to balance long travel and high precision, especially in multi-coordinate machining. A stage with nanometer positioning precision is established and the control technologies are studied. Micro-EDM provides the potential feasibility for the nano-scale precision machining. The micro-EDM transmission modular is applied to to complete the discharge process of the servo in the experiment system ,which improves the processing efficiency and the processing quality. The strategy is one part of micro-EDM machine control system, which greatly enhances the positioning accuracy. Results show that the system works well. The system also has many advantages such as quick response, being smooth, ultra low speed and super resolution etc, and meets the needs of micro-EDM control. The research provides a new solution for the design of precision location stages.

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