Abstract
A new type of 3-D micron-scale actuator is designed, which is mainly composed of four Galfenol rods, drive coils, base, magnetic yoke and output head. According to magnetostrictive model and structural dynamic model, the output characteristics of the actuator have been analyzed. The 3-D moving trail of the output head is controlled by the drive coils of the four rods. The actuator prototype is fabricated and experimental investigated. Good agreement is observed between the simulation and experimental results. The maximum output displacements of the X, Y and Z direction are 46 μm, 46 μm and 8.2 μm. Furthermore, when a pair of opposing rods works, the actuator has two modes of vibration under 1000 Hz. The resonant frequencies of the actuator are 522 Hz in Y direction and X direction. The results have proved that the actuator can realize varied 3-D displacement according to actual demands, and can be used in 3-D micron-scale field, such as surface mold polishing.
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