Design and optimization of large-scale single-crystal furnaces asymmetric hooked magnetic fields

Abstract

The solar photovoltaic power generation industry and large-scale integrated circuit industry put forward higher requirements for the size and quality of monocrystalline silicon. However, there are some problems in the production of large-diameter and high-quality monocrystalline silicon, such as uneven crucible thermal field and strong melt convection, which affect the quality of monocrystalline silicon. Therefore, by adopting the finite element 2D modeling method, this paper established the asymmetric hook magnetic field model of the 40-inch crucible. Hence the key magnetic field parameters affecting the growth of a single crystal were determined by controlling the melt convection in the crucible. Meanwhile, through finite element static magnetic field simulations, the effect of the magnetic field at the crucible wall was analyzed by adding the upper and lower guide rings of the magnetic shield structure, the magnetic shield structure with intermediate permeability ring, and the coil parameters. In addition, the parameters of the asymmetric hooked magnetic field structure were also optimized based on the simulation data. On the above basis, a numerical simulation analysis of the key parameters of the magnetic field was carried out. The simulation results show that the optimized asymmetric hook magnetic field structure can effectively control the melt convection in the crucible. In addition, the magnetic field strength at the crucible wall can meet the target of restraining convection by a magnetic field. Hence, it provides a certain reference value for the design of a large-scale single crystal furnace magnetic field.